diff --git a/python/sglang/srt/layers/sampler.py b/python/sglang/srt/layers/sampler.py
index 7421bda18..454078d59 100644
--- a/python/sglang/srt/layers/sampler.py
+++ b/python/sglang/srt/layers/sampler.py
@@ -21,6 +21,10 @@ logger = logging.getLogger(__name__)
 
 
 class Sampler(nn.Module):
+    def __init__(self):
+        super().__init__()
+        self.use_nan_detectioin = not global_server_args_dict["disable_nan_detection"]
+
     def forward(
         self,
         logits: Union[torch.Tensor, LogitsProcessorOutput],
@@ -36,13 +40,13 @@ class Sampler(nn.Module):
         logits = None
         del logits
 
-        if torch.any(torch.isnan(probs)):
+        if self.use_nan_detectioin and torch.any(torch.isnan(probs)):
             logger.warning("Detected errors during sampling! NaN in the probability.")
             probs = torch.where(
                 torch.isnan(probs), torch.full_like(probs, 1e-10), probs
             )
 
-        if sampling_info.top_ks.max().item() <= 1:
+        if sampling_info.is_all_greedy:
             # Use torch.argmax if all requests use greedy sampling
             batch_next_token_ids = torch.argmax(probs, -1)
         elif global_server_args_dict["sampling_backend"] == "flashinfer":
diff --git a/python/sglang/srt/managers/schedule_batch.py b/python/sglang/srt/managers/schedule_batch.py
index 000f8ecdc..8e55fb1d7 100644
--- a/python/sglang/srt/managers/schedule_batch.py
+++ b/python/sglang/srt/managers/schedule_batch.py
@@ -53,6 +53,7 @@ global_server_args_dict = {
     "triton_attention_reduce_in_fp32": ServerArgs.triton_attention_reduce_in_fp32,
     "disable_mla": ServerArgs.disable_mla,
     "torchao_config": ServerArgs.torchao_config,
+    "disable_nan_detection": ServerArgs.disable_nan_detection,
 }
 
 
diff --git a/python/sglang/srt/model_executor/cuda_graph_runner.py b/python/sglang/srt/model_executor/cuda_graph_runner.py
index cdf3a77c9..d3ff3cd1d 100644
--- a/python/sglang/srt/model_executor/cuda_graph_runner.py
+++ b/python/sglang/srt/model_executor/cuda_graph_runner.py
@@ -245,10 +245,10 @@ class CudaGraphRunner:
             self.out_cache_loc.zero_()
 
         # Common inputs
-        self.input_ids[:raw_bs] = forward_batch.input_ids
-        self.req_pool_indices[:raw_bs] = forward_batch.req_pool_indices
-        self.seq_lens[:raw_bs] = forward_batch.seq_lens
-        self.out_cache_loc[:raw_bs] = forward_batch.out_cache_loc
+        self.input_ids[:raw_bs].copy_(forward_batch.input_ids)
+        self.req_pool_indices[:raw_bs].copy_(forward_batch.req_pool_indices)
+        self.seq_lens[:raw_bs].copy_(forward_batch.seq_lens)
+        self.out_cache_loc[:raw_bs].copy_(forward_batch.out_cache_loc)
 
         # Attention backend
         self.model_runner.attn_backend.init_forward_metadata_replay_cuda_graph(
diff --git a/python/sglang/srt/model_executor/model_runner.py b/python/sglang/srt/model_executor/model_runner.py
index a60ac1c70..a8e64205b 100644
--- a/python/sglang/srt/model_executor/model_runner.py
+++ b/python/sglang/srt/model_executor/model_runner.py
@@ -137,6 +137,7 @@ class ModelRunner:
                 "disable_mla": server_args.disable_mla,
                 "torchao_config": server_args.torchao_config,
                 "disable_penalizer": server_args.disable_penalizer,
+                "disable_nan_detection": server_args.disable_nan_detection,
             }
         )
 
diff --git a/python/sglang/srt/sampling/sampling_batch_info.py b/python/sglang/srt/sampling/sampling_batch_info.py
index 37dedcd17..457b100e9 100644
--- a/python/sglang/srt/sampling/sampling_batch_info.py
+++ b/python/sglang/srt/sampling/sampling_batch_info.py
@@ -20,6 +20,9 @@ class SamplingBatchInfo:
     top_ks: torch.Tensor
     min_ps: torch.Tensor
 
+    # All requests use greedy sampling
+    is_all_greedy: bool
+
     # Dispatch in CUDA graph
     need_min_p_sampling: bool
 
@@ -73,6 +76,7 @@ class SamplingBatchInfo:
             top_ks=top_ks,
             min_ps=min_ps,
             need_min_p_sampling=any(r.sampling_params.min_p > 0 for r in reqs),
+            is_all_greedy=top_ks.max().item() <= 1,
             vocab_size=vocab_size,
             device=batch.input_ids.device,
         )
@@ -204,6 +208,7 @@ class SamplingBatchInfo:
             other_val = getattr(other, item, None)
             setattr(self, item, torch.concat([self_val, other_val]))
 
+        self.is_all_greedy = self.is_all_greedy and other.is_all_greedy
         self.logit_bias = SamplingBatchInfo.merge_bias_tensor(
             self.logit_bias, other.logit_bias, len(self), len(other), self.device
         )
diff --git a/python/sglang/srt/server_args.py b/python/sglang/srt/server_args.py
index 10f63e697..722e30f6b 100644
--- a/python/sglang/srt/server_args.py
+++ b/python/sglang/srt/server_args.py
@@ -114,6 +114,7 @@ class ServerArgs:
     disable_custom_all_reduce: bool = False
     disable_mla: bool = False
     disable_penalizer: bool = False
+    disable_nan_detection: bool = False
     enable_overlap_schedule: bool = False
     enable_mixed_chunk: bool = False
     enable_torch_compile: bool = False
@@ -577,7 +578,12 @@ class ServerArgs:
         parser.add_argument(
             "--disable-penalizer",
             action="store_true",
-            help="Disable the logit penalizer (e.g., frequency and repetition penalty).",
+            help="Disable the logit penalizers (e.g., frequency and repetition penalty) for better performance if they are not used in any requests.",
+        )
+        parser.add_argument(
+            "--disable-nan-detection",
+            action="store_true",
+            help="Disable the NaN detection for better performance.",
         )
         parser.add_argument(
             "--enable-overlap-schedule",